UNE-EN ISO 25178-604:2013 幾何產(chǎn)品規(guī)格(GPS)表面紋理:面積 第604部分:非接觸式(相干掃描干涉測量)儀器的標稱特性
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013) (Endorsed by AENOR in January of 2015.)